• Vergangener Event, On Demand
• Original Datum: 12. Januar 2021

Microstrurure devices and MEMS are indispensable components in medical diagnostic techniques like ultrasonic imaging or disease testing. Different technologies and approaches are progressing for lab-on-a-chip designs for reliable and cost effective disease diagnostics. Laser vibrometry is the ideal tool to experimentally verify the designs of such devices. The optical metrology measurements allow to obtain pm vibration amplitudes at a few microns lateral resolution, thus providing an accurate view of device operation and confirming the validity of the designs.